Next-generation lithography: Revision history

10 January 2024

• curprev 00:5800:58, 10 January 2024‎ Atibrarian talk contribs‎ 10,302 bytes +15‎ Open access status updates in citations with OAbot #oabot undo Tag: OAbot [2.1]

7 December 2023

• curprev 21:2721:27, 7 December 2023‎ Natg 19 talk contribs‎ m 10,287 bytes +14‎ Disambiguating links to 10 nm (link changed to 10 nm process) using DisamAssist. undo

3 December 2023

• curprev 23:2923:29, 3 December 2023‎ Me, Myself, and I are Here talk contribs‎ 10,273 bytes −6‎ bold, punct, ce undo

4 September 2023

• curprev 13:2413:24, 4 September 2023‎ 188.92.33.51 talk‎ 10,279 bytes 0‎ SADF replace with SADP (Self Aligned Double Patterning) Can find no evidence of the acronym SDF. undo

7 July 2023

• curprev 21:3521:35, 7 July 2023‎ Jyanjinyuan talk contribs‎ 10,279 bytes +120‎ No edit summary undo

1 July 2023

• curprev 07:5107:51, 1 July 2023‎ 73.68.42.169 talk‎ 10,159 bytes −3,873‎ Badly outdated to the point of being incorrect- EUVL has been in use for multiple years undo Tags: section blanking Mobile edit Mobile web edit

15 May 2023

• curprev 10:1810:18, 15 May 2023‎ Citation bot talk contribs‎ 14,032 bytes −103‎ Alter: url. URLs might have been anonymized. | Use this bot. Report bugs. | Suggested by AManWithNoPlan | Linked from User:AManWithNoPlan/sandbox4 | #UCB_webform_linked 586/890 undo

27 February 2023

• curprev 21:2921:29, 27 February 2023‎ Twiximus talk contribs‎ 14,135 bytes +51‎ added mentions of entanglement techniques for NGL, linking quantum lithography into the page undo

25 January 2023

• curprev 17:3617:36, 25 January 2023‎ Citation bot talk contribs‎ 14,084 bytes +16‎ Add: s2cid. | Use this bot. Report bugs. | Suggested by Abductive | #UCB_webform 56/3850 undo

5 October 2022

• curprev 22:2522:25, 5 October 2022‎ Lokys dar Vienas talk contribs‎ 14,068 bytes +36‎ No edit summary undo

5 September 2022

• curprev 14:0014:00, 5 September 2022‎ Vivida1 talk contribs‎ m 14,032 bytes +1‎ Hypothetical spelling undo

22 April 2022

• curprev 02:2802:28, 22 April 2022‎ Nyq talk contribs‎ m 14,031 bytes 0‎ lc per MOS:CAPSACRS undo Tags: Visual edit Mobile edit Mobile web edit Advanced mobile edit
• curprev 02:2602:26, 22 April 2022‎ Nyq talk contribs‎ m 14,031 bytes 0‎ lc per MOS:SECTIONCAPS, sentence case undo Tags: Visual edit Mobile edit Mobile web edit Advanced mobile edit

30 August 2021

• curprev 17:2317:23, 30 August 2021‎ BrownHairedGirl talk contribs‎ m 14,031 bytes +33‎ fix some CS1 parameters, e.g. unsupported "|deadurl" or typo "|itle"; possibly also canonicalise other params and/or H:BR fixes undo Tag: AWB
• curprev 17:2217:22, 30 August 2021‎ BrownHairedGirl talk contribs‎ 13,998 bytes +394‎ Filled in 7 bare reference(s) with reFill 2 undo

29 August 2021

• curprev 20:2620:26, 29 August 2021‎ Citation bot talk contribs‎ 13,604 bytes +35‎ Add: doi. | Use this bot. Report bugs. | Suggested by BrownHairedGirl | Linked from User:BrownHairedGirl/Articles_with_bare_links | #UCB_webform_linked 819/2190 undo

23 August 2021

• curprev 03:5203:52, 23 August 2021‎ 121.200.4.36 talk‎ 13,569 bytes −2‎ minor typo undo Tags: Mobile edit Mobile web edit

21 August 2021

• curprev 06:5306:53, 21 August 2021‎ Alexander Davronov talk contribs‎ 13,571 bytes +52‎ →‎NGL issues undo Tag: Visual edit

20 April 2021

• curprev 19:3219:32, 20 April 2021‎ WikiCleanerBot talk contribs‎ m 13,519 bytes 0‎ v2.04b - Bot T20 CW#61 - Fix errors for CW project (Reference before punctuation) undo Tag: WPCleaner

16 April 2021

• curprev 10:3210:32, 16 April 2021‎ AnomieBOT talk contribs‎ m 13,519 bytes +16‎ Dating maintenance tags: {{Citation-needed}} undo
• curprev 08:3108:31, 16 April 2021‎ SSSheridan talk contribs‎ m 13,503 bytes −16‎ No edit summary undo
• curprev 08:3008:30, 16 April 2021‎ SSSheridan talk contribs‎ 13,519 bytes +1,122‎ Major update and rewrite of top section, which was years out of date. I'm an outsider to the field, so please check my changes. undo

9 April 2021

• curprev 08:1808:18, 9 April 2021‎ Mhudbar talk contribs‎ m 12,397 bytes +645‎ extra citations undo

13 January 2021

• curprev 12:4212:42, 13 January 2021‎ 2001:b011:e003:13a6:19be:a06c:2fe:b4b8 talk‎ 11,752 bytes +309‎ →‎Fundamental issues undo

22 June 2020

• curprev 14:3114:31, 22 June 2020‎ 5.198.10.236 talk‎ 11,443 bytes +6‎ →‎NGL issues undo
• curprev 14:3114:31, 22 June 2020‎ 5.198.10.236 talk‎ 11,437 bytes +28‎ →‎NGL issues: slim table undo
• curprev 14:2914:29, 22 June 2020‎ 5.198.10.236 talk‎ 11,409 bytes +802‎ →‎NGL issues: replace "unreadable" table image with actual table based on it - please use text tables for tables, not images undo

4 May 2020

• curprev 08:0008:00, 4 May 2020‎ Pancho507 talk contribs‎ 10,607 bytes +1‎ Changing short description from "Novel photolithoghaphy techniques" to "Novel photolithoghaphic techniques" (Shortdesc helper) undo
• curprev 08:0008:00, 4 May 2020‎ Pancho507 talk contribs‎ 10,606 bytes +56‎ Adding short description: "Novel photolithoghaphy techniques" (Shortdesc helper) undo

14 March 2020

• curprev 13:3213:32, 14 March 2020‎ Dawnseeker2000 talk contribs‎ m 10,550 bytes −18‎ minor nitpicking undo

23 December 2019

• curprev 02:3902:39, 23 December 2019‎ 2605:6000:1024:4b1:44b3:7f1d:9f8f:d44c talk‎ 10,568 bytes −4‎ No edit summary undo

27 September 2019

• curprev 01:5901:59, 27 September 2019‎ Monkbot talk contribs‎ m 10,572 bytes +3‎ →‎Summary Table: Task 16: replaced (1×) / removed (0×) deprecated |dead-url= and |deadurl= with |url-status=; undo Tag: AWB

3 June 2019

• curprev 19:1519:15, 3 June 2019‎ Alexander Davronov talk contribs‎ 10,569 bytes +62‎ No edit summary undo

12 April 2019

• curprev 12:1812:18, 12 April 2019‎ InternetArchiveBot talk contribs‎ 10,507 bytes +212‎ Rescuing 1 sources and tagging 0 as dead. #IABot (v2.0beta14) undo

6 January 2019

• curprev 15:2915:29, 6 January 2019‎ Kkmurray talk contribs‎ 10,295 bytes +33‎ Added {{essay-like}} tag to article (TW) undo
• curprev 15:2815:28, 6 January 2019‎ Kkmurray talk contribs‎ 10,262 bytes −25‎ Clean up undo

21 November 2018

• curprev 20:3320:33, 21 November 2018‎ MaxEnt talk contribs‎ 10,287 bytes +24‎ I don't like "open air" very much, but it sure beats semantic incoherence undo

18 February 2018

• curprev 03:5403:54, 18 February 2018‎ InternetArchiveBot talk contribs‎ 10,263 bytes +137‎ Rescuing 1 sources and tagging 0 as dead. #IABot (v1.6.2) undo

19 October 2017

• curprev 17:2517:25, 19 October 2017‎ Whoop whoop pull up talk contribs‎ m 10,126 bytes +3‎ →‎Summary Table undo

17 February 2017

• curprev 00:0100:01, 17 February 2017‎ Primefac talk contribs‎ m 10,123 bytes −4‎ Reverted edits by Fmadd (talk) to last version by GreenC bot undo

6 February 2017

• curprev 17:2617:26, 6 February 2017‎ Fmadd talk contribs‎ m 10,127 bytes +4‎ No edit summary undo

8 December 2016

• curprev 16:5816:58, 8 December 2016‎ GreenC bot talk contribs‎ m 10,123 bytes +39‎ 1 archive template merged to {{webarchive}} (WAM) undo

30 November 2016

• curprev 00:5600:56, 30 November 2016‎ InternetArchiveBot talk contribs‎ 10,084 bytes +160‎ Rescuing 1 sources and tagging 0 as dead. #IABot (v1.2.7.1) undo

26 August 2016

• curprev 00:4700:47, 26 August 2016‎ AnomieBOT talk contribs‎ m 9,924 bytes +17‎ Dating maintenance tags: {{Dead link}} undo

25 August 2016

• curprev 22:4622:46, 25 August 2016‎ ASavantDude talk contribs‎ 9,907 bytes +15‎ →‎Summary Table undo

29 April 2016

• curprev 01:5701:57, 29 April 2016‎ Guiding light talk contribs‎ 9,892 bytes +219‎ →‎Summary Table undo
• curprev 01:5501:55, 29 April 2016‎ Guiding light talk contribs‎ 9,673 bytes +10‎ →‎Market issues undo
• curprev 01:4701:47, 29 April 2016‎ Guiding light talk contribs‎ 9,663 bytes +13‎ →‎Summary Table undo
• curprev 01:4601:46, 29 April 2016‎ Guiding light talk contribs‎ 9,650 bytes +239‎ →‎Market issues undo

26 April 2016

• curprev 02:3302:33, 26 April 2016‎ Guiding light talk contribs‎ 9,411 bytes +7‎ →‎Summary Table undo