Next-generation lithography: Revision history

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curprev 00:5800:58, 10 January 2024‎ Atibrarian talk contribs‎ 10,302 bytes +15‎ Open access status updates in citations with OAbot #oabot undo Tag: OAbot [2.1]

curprev 21:2721:27, 7 December 2023‎ Natg 19 talk contribs‎ m 10,287 bytes +14‎ Disambiguating links to 10 nm (link changed to 10 nm process) using DisamAssist. undo

curprev 23:2923:29, 3 December 2023‎ Me, Myself, and I are Here talk contribs‎ 10,273 bytes −6‎ bold, punct, ce undo

curprev 13:2413:24, 4 September 2023‎ 188.92.33.51 talk‎ 10,279 bytes 0‎ SADF replace with SADP (Self Aligned Double Patterning) Can find no evidence of the acronym SDF. undo

curprev 21:3521:35, 7 July 2023‎ Jyanjinyuan talk contribs‎ 10,279 bytes +120‎ No edit summary undo

curprev 07:5107:51, 1 July 2023‎ 73.68.42.169 talk‎ 10,159 bytes −3,873‎ Badly outdated to the point of being incorrect- EUVL has been in use for multiple years undo Tags: section blanking Mobile edit Mobile web edit

curprev 10:1810:18, 15 May 2023‎ Citation bot talk contribs‎ 14,032 bytes −103‎ Alter: url. URLs might have been anonymized. | Use this bot. Report bugs. | Suggested by AManWithNoPlan | Linked from User:AManWithNoPlan/sandbox4 | #UCB_webform_linked 586/890 undo

curprev 21:2921:29, 27 February 2023‎ Twiximus talk contribs‎ 14,135 bytes +51‎ added mentions of entanglement techniques for NGL, linking quantum lithography into the page undo

curprev 17:3617:36, 25 January 2023‎ Citation bot talk contribs‎ 14,084 bytes +16‎ Add: s2cid. | Use this bot. Report bugs. | Suggested by Abductive | #UCB_webform 56/3850 undo

curprev 22:2522:25, 5 October 2022‎ Lokys dar Vienas talk contribs‎ 14,068 bytes +36‎ No edit summary undo

curprev 14:0014:00, 5 September 2022‎ Vivida1 talk contribs‎ m 14,032 bytes +1‎ Hypothetical spelling undo

curprev 02:2802:28, 22 April 2022‎ Nyq talk contribs‎ m 14,031 bytes 0‎ lc per MOS:CAPSACRS undo Tags: Visual edit Mobile edit Mobile web edit Advanced mobile edit
curprev 02:2602:26, 22 April 2022‎ Nyq talk contribs‎ m 14,031 bytes 0‎ lc per MOS:SECTIONCAPS, sentence case undo Tags: Visual edit Mobile edit Mobile web edit Advanced mobile edit

curprev 17:2317:23, 30 August 2021‎ BrownHairedGirl talk contribs‎ m 14,031 bytes +33‎ fix some CS1 parameters, e.g. unsupported "|deadurl" or typo "|itle"; possibly also canonicalise other params and/or H:BR fixes undo Tag: AWB
curprev 17:2217:22, 30 August 2021‎ BrownHairedGirl talk contribs‎ 13,998 bytes +394‎ Filled in 7 bare reference(s) with reFill 2 undo

curprev 20:2620:26, 29 August 2021‎ Citation bot talk contribs‎ 13,604 bytes +35‎ Add: doi. | Use this bot. Report bugs. | Suggested by BrownHairedGirl | Linked from User:BrownHairedGirl/Articles_with_bare_links | #UCB_webform_linked 819/2190 undo

curprev 03:5203:52, 23 August 2021‎ 121.200.4.36 talk‎ 13,569 bytes −2‎ minor typo undo Tags: Mobile edit Mobile web edit

curprev 06:5306:53, 21 August 2021‎ Alexander Davronov talk contribs‎ 13,571 bytes +52‎ →‎NGL issues undo Tag: Visual edit

curprev 19:3219:32, 20 April 2021‎ WikiCleanerBot talk contribs‎ m 13,519 bytes 0‎ v2.04b - Bot T20 CW#61 - Fix errors for CW project (Reference before punctuation) undo Tag: WPCleaner

curprev 10:3210:32, 16 April 2021‎ AnomieBOT talk contribs‎ m 13,519 bytes +16‎ Dating maintenance tags: {{Citation-needed}} undo
curprev 08:3108:31, 16 April 2021‎ SSSheridan talk contribs‎ m 13,503 bytes −16‎ No edit summary undo
curprev 08:3008:30, 16 April 2021‎ SSSheridan talk contribs‎ 13,519 bytes +1,122‎ Major update and rewrite of top section, which was years out of date. I'm an outsider to the field, so please check my changes. undo

curprev 08:1808:18, 9 April 2021‎ Mhudbar talk contribs‎ m 12,397 bytes +645‎ extra citations undo

curprev 12:4212:42, 13 January 2021‎ 2001:b011:e003:13a6:19be:a06c:2fe:b4b8 talk‎ 11,752 bytes +309‎ →‎Fundamental issues undo

curprev 14:3114:31, 22 June 2020‎ 5.198.10.236 talk‎ 11,443 bytes +6‎ →‎NGL issues undo
curprev 14:3114:31, 22 June 2020‎ 5.198.10.236 talk‎ 11,437 bytes +28‎ →‎NGL issues: slim table undo
curprev 14:2914:29, 22 June 2020‎ 5.198.10.236 talk‎ 11,409 bytes +802‎ →‎NGL issues: replace "unreadable" table image with actual table based on it - please use text tables for tables, not images undo

curprev 08:0008:00, 4 May 2020‎ Pancho507 talk contribs‎ 10,607 bytes +1‎ Changing short description from "Novel photolithoghaphy techniques" to "Novel photolithoghaphic techniques" (Shortdesc helper) undo
curprev 08:0008:00, 4 May 2020‎ Pancho507 talk contribs‎ 10,606 bytes +56‎ Adding short description: "Novel photolithoghaphy techniques" (Shortdesc helper) undo

curprev 13:3213:32, 14 March 2020‎ Dawnseeker2000 talk contribs‎ m 10,550 bytes −18‎ minor nitpicking undo

curprev 02:3902:39, 23 December 2019‎ 2605:6000:1024:4b1:44b3:7f1d:9f8f:d44c talk‎ 10,568 bytes −4‎ No edit summary undo

curprev 01:5901:59, 27 September 2019‎ Monkbot talk contribs‎ m 10,572 bytes +3‎ →‎Summary Table: Task 16: replaced (1×) / removed (0×) deprecated |dead-url= and |deadurl= with |url-status=; undo Tag: AWB

curprev 19:1519:15, 3 June 2019‎ Alexander Davronov talk contribs‎ 10,569 bytes +62‎ No edit summary undo

curprev 12:1812:18, 12 April 2019‎ InternetArchiveBot talk contribs‎ 10,507 bytes +212‎ Rescuing 1 sources and tagging 0 as dead. #IABot (v2.0beta14) undo

curprev 15:2915:29, 6 January 2019‎ Kkmurray talk contribs‎ 10,295 bytes +33‎ Added {{essay-like}} tag to article (TW) undo
curprev 15:2815:28, 6 January 2019‎ Kkmurray talk contribs‎ 10,262 bytes −25‎ Clean up undo

curprev 20:3320:33, 21 November 2018‎ MaxEnt talk contribs‎ 10,287 bytes +24‎ I don't like "open air" very much, but it sure beats semantic incoherence undo

curprev 03:5403:54, 18 February 2018‎ InternetArchiveBot talk contribs‎ 10,263 bytes +137‎ Rescuing 1 sources and tagging 0 as dead. #IABot (v1.6.2) undo

curprev 17:2517:25, 19 October 2017‎ Whoop whoop pull up talk contribs‎ m 10,126 bytes +3‎ →‎Summary Table undo

curprev 00:0100:01, 17 February 2017‎ Primefac talk contribs‎ m 10,123 bytes −4‎ Reverted edits by Fmadd (talk) to last version by GreenC bot undo

curprev 17:2617:26, 6 February 2017‎ Fmadd talk contribs‎ m 10,127 bytes +4‎ No edit summary undo

curprev 16:5816:58, 8 December 2016‎ GreenC bot talk contribs‎ m 10,123 bytes +39‎ 1 archive template merged to {{webarchive}} (WAM) undo

curprev 00:5600:56, 30 November 2016‎ InternetArchiveBot talk contribs‎ 10,084 bytes +160‎ Rescuing 1 sources and tagging 0 as dead. #IABot (v1.2.7.1) undo

curprev 00:4700:47, 26 August 2016‎ AnomieBOT talk contribs‎ m 9,924 bytes +17‎ Dating maintenance tags: {{Dead link}} undo

curprev 22:4622:46, 25 August 2016‎ ASavantDude talk contribs‎ 9,907 bytes +15‎ →‎Summary Table undo

curprev 01:5701:57, 29 April 2016‎ Guiding light talk contribs‎ 9,892 bytes +219‎ →‎Summary Table undo
curprev 01:5501:55, 29 April 2016‎ Guiding light talk contribs‎ 9,673 bytes +10‎ →‎Market issues undo
curprev 01:4701:47, 29 April 2016‎ Guiding light talk contribs‎ 9,663 bytes +13‎ →‎Summary Table undo
curprev 01:4601:46, 29 April 2016‎ Guiding light talk contribs‎ 9,650 bytes +239‎ →‎Market issues undo

curprev 12:3312:33, 22 September 2015‎ 85.193.200.21 talk‎ 9,985 bytes 0‎ No edit summary undo

curprev 16:2516:25, 16 July 2015‎ Guillaume.web talk contribs‎ 9,985 bytes +29‎ Added outdated template undo

curprev 10:0910:09, 14 September 2014‎ Nczempin talk contribs‎ 9,956 bytes −12‎ →‎top: no need for editorial comments undo

curprev 16:5116:51, 24 March 2014‎ Mean as custard talk contribs‎ m 9,968 bytes −370‎ Reverted edits by Mhimanieh (talk) to last version by 122.164.85.114 undo
curprev 16:4416:44, 24 March 2014‎ Mhimanieh talk contribs‎ 10,338 bytes +370‎ →‎References undo

curprev 12:5512:55, 10 September 2013‎ 122.164.85.114 talk‎ 9,968 bytes −12‎ No edit summary undo
curprev 12:5012:50, 10 September 2013‎ 122.164.85.114 talk‎ 9,980 bytes +7‎ No edit summary undo

curprev 09:4609:46, 14 March 2013‎ Addbot talk contribs‎ m 9,973 bytes −36‎ Bot: Migrating 1 interwiki links, now provided by Wikidata on d:q1983848 undo

curprev 08:4108:41, 22 February 2013‎ Anomalocaris talk contribs‎ m 10,009 bytes +46‎ italics; subscripts; dashes undo

curprev 10:2910:29, 30 June 2012‎ Wdwd talk contribs‎ m 9,963 bytes +36‎ Add inter wikilink undo

curprev 13:5413:54, 5 August 2011‎ 128.172.52.225 talk‎ 9,927 bytes −57‎ No edit summary undo
curprev 13:5313:53, 5 August 2011‎ 128.172.52.225 talk‎ 9,984 bytes +57‎ No edit summary undo

curprev 17:0417:04, 3 May 2011‎ Frap talk contribs‎ 9,927 bytes +21‎ No edit summary undo

curprev 15:3015:30, 27 September 2010‎ Rich Farmbrough talk contribs‎ m 9,906 bytes +83‎ Clarify date from /// format and general fixes using AWB undo

curprev 16:5516:55, 17 June 2010‎ Zackhyde talk contribs‎ m 9,823 bytes +4‎ No edit summary undo

curprev 12:1812:18, 8 December 2009‎ 218.160.238.65 talk‎ 9,819 bytes +398‎ →‎NGL issues undo

curprev 06:5906:59, 24 October 2009‎ Andries talk contribs‎ 9,421 bytes +1‎ "Currently"--> "As of 2009"" undo

curprev 05:0805:08, 16 October 2009‎ Oleg Alexandrov talk contribs‎ m 9,420 bytes +4‎ style and link undo

curprev 08:3108:31, 11 October 2009‎ 218.35.240.53 talk‎ 9,416 bytes +110‎ →‎NGL issues undo
curprev 08:1808:18, 11 October 2009‎ 218.35.240.53 talk‎ 9,306 bytes 0‎ →‎NGL issues: more up to date example, fitting with figures undo

curprev 07:1807:18, 9 October 2009‎ Guiding light talk contribs‎ 9,306 bytes +193‎ →‎NGL issues undo
curprev 07:0407:04, 9 October 2009‎ Guiding light talk contribs‎ 9,113 bytes −10‎ →‎NGL issues: simplified figure undo

curprev 12:2312:23, 1 October 2009‎ 218.160.239.138 talk‎ 9,123 bytes +4‎ wiki link for 11 nm undo
curprev 12:2212:22, 1 October 2009‎ 218.160.239.138 talk‎ 9,119 bytes +46‎ DP extended 11 nm (from that article) undo

curprev 06:5906:59, 30 September 2009‎ Guiding light talk contribs‎ m 9,073 bytes +7‎ figure change undo

curprev 01:2701:27, 28 September 2009‎ Guiding light talk contribs‎ m 9,066 bytes −11‎ picture caption edit undo

curprev 23:2123:21, 8 September 2009‎ DrilBot talk contribs‎ m 9,077 bytes +155‎ Check Wikipedia cleanup (header levels) + gen. fixes undo

curprev 12:2712:27, 17 July 2009‎ 218.168.211.208 talk‎ 9,006 bytes +80‎ →‎NGL issues: updating for 22 nm as new NGL insertion point undo

curprev 22:1722:17, 15 May 2009‎ D6 talk contribs‎ m 8,926 bytes −1‎ fix headline (WikiProject Check Wikipedia check #57 undo

curprev 14:2214:22, 17 December 2008‎ 218.168.209.123 talk‎ 8,927 bytes +41‎ →‎Summary Table: undo
curprev 12:3512:35, 17 December 2008‎ 218.168.209.123 talk‎ 8,886 bytes +18‎ →‎Summary Table: undo

curprev 05:5005:50, 9 December 2008‎ Devanney talk contribs‎ 8,868 bytes +32‎ + link computational lithography undo

curprev 03:2303:23, 9 November 2008‎ 124.218.42.26 talk‎ 8,836 bytes +236‎ NGL postponement undo

curprev 03:3503:35, 25 October 2008‎ 218.168.207.250 talk‎ 8,600 bytes +185‎ →‎Summary Table: undo

curprev 13:1513:15, 13 September 2008‎ Dwi Secundus talk contribs‎ m 8,415 bytes −2‎ →‎Summary Table:: fix link (now really!) undo
curprev 13:1313:13, 13 September 2008‎ Dwi Secundus talk contribs‎ m 8,417 bytes −2‎ →‎Summary Table:: linkfix undo

curprev 23:1523:15, 5 August 2008‎ 218.168.206.137 talk‎ 6,966 bytes +37‎ →‎NGL issues undo
curprev 14:0014:00, 5 August 2008‎ 218.168.206.137 talk‎ 6,929 bytes +306‎ →‎NGL issues: Increasing gap between trailing and leading edge companies makes NGL deployment even more disruptive undo

curprev 14:4014:40, 4 August 2008‎ Guiding light talk contribs‎ 6,623 bytes +64‎ NGLs face prohibitive issues undo
curprev 14:3714:37, 4 August 2008‎ Guiding light talk contribs‎ 6,559 bytes −9‎ →‎Summary Table:: 0 nm is prohibitive undo
curprev 14:1814:18, 4 August 2008‎ Guiding light talk contribs‎ 6,568 bytes −50‎ →‎Summary Table: undo
curprev 10:0710:07, 4 August 2008‎ 218.168.211.73 talk‎ 6,618 bytes +31‎ →‎Summary Table: undo

curprev 12:5312:53, 2 August 2008‎ 218.168.213.139 talk‎ 6,587 bytes +873‎ →‎NGL issues: example of two companies undo
curprev 10:5610:56, 2 August 2008‎ 218.168.213.139 talk‎ 5,714 bytes +62‎ References section undo
curprev 10:5410:54, 2 August 2008‎ 218.168.213.139 talk‎ 5,652 bytes +466‎ →‎NGL issues: reference added undo
curprev 10:3610:36, 2 August 2008‎ 218.168.213.139 talk‎ 5,186 bytes +668‎ NGL issues section undo

curprev 03:5503:55, 23 July 2008‎ Guiding light talk contribs‎ 4,518 bytes +94‎ →‎Summary Table: undo
curprev 03:4603:46, 23 July 2008‎ Guiding light talk contribs‎ 4,424 bytes +1,244‎ →‎Summary Table:: (data references to be added later) undo
curprev 02:3502:35, 23 July 2008‎ Guiding light talk contribs‎ 3,180 bytes +644‎ summary table undo

curprev 11:0511:05, 13 May 2008‎ Endymi0n talk contribs‎ m 2,536 bytes +5‎ No edit summary undo

curprev 04:5804:58, 3 November 2007‎ Altenmann talk contribs‎ m 875 bytes −46‎ No edit summary undo
curprev 04:5504:55, 3 November 2007‎ Altenmann talk contribs‎ m 921 bytes −67‎ →‎See also undo
curprev 04:0104:01, 3 November 2007‎ Altenmann talk contribs‎ 988 bytes −4‎ Category:Lithography (micromanufacturing) undo
curprev 03:3103:31, 3 November 2007‎ Oleg Alexandrov talk contribs‎ 992 bytes +3‎ Category:Lithography (semiconductor industry) undo

curprev 13:1013:10, 24 September 2007‎ 125.201.161.254 talk‎ 989 bytes +48‎ →‎See also: +cat undo

curprev 12:0412:04, 10 July 2007‎ FindEngine talk contribs‎ m 941 bytes +179‎ Minor changes, link to Moore's Law and ITRS undo

curprev 01:3201:32, 25 April 2007‎ 61.61.254.9 talk‎ 762 bytes +13‎ 32 nm node wiki undo
curprev 01:3101:31, 25 April 2007‎ 61.61.254.9 talk‎ 749 bytes +12‎ FIB -> focused ion beam lithography (rather than sputtering/milling) undo

curprev 05:3005:30, 22 February 2006‎ Guiding light talk contribs‎ 216 bytes −5‎ Update definition of NGL undo

curprev 01:2301:23, 9 November 2005‎ Spaceharper talk contribs‎ m 221 bytes −6‎ fmt undo

curprev 05:0305:03, 2 July 2005‎ Sjncd talk contribs‎ m 227 bytes +1‎ No edit summary undo
curprev 05:0205:02, 2 July 2005‎ Sjncd talk contribs‎ 226 bytes +226‎ No edit summary

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