Tungsten nitride: Difference between revisions
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'''Tungsten nitride''' ('''WN''') is an inorganic compound, a [[nitride]] of [[tungsten]]. It is a [[ceramic]] material. It is electrically conductive. It is a very hard solid material. |
'''Tungsten nitride''' ('''WN<sub>2</sub>''') is an inorganic compound, a [[nitride]] of [[tungsten]]. It is a [[ceramic]] material. It is electrically conductive. It is a very hard solid material. It has brown color. It decomposes in water. |
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It is used in [[microelectronics]] as a [[wire bonding|contact material]], for conductive layers, and [[barrier layer]]s between [[silicon]] and other metals, eg. [[tungsten]] or [[copper]]. It is less commonly used than [[titanium nitride]] or [[tungsten]] films. |
It is used in [[microelectronics]] as a [[wire bonding|contact material]], for conductive layers, and [[barrier layer]]s between [[silicon]] and other metals, eg. [[tungsten]] or [[copper]]. It is less commonly used than [[titanium nitride]] or [[tungsten]] films. |
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Revision as of 19:02, 27 October 2009
Tungsten nitride (WN2) is an inorganic compound, a nitride of tungsten. It is a ceramic material. It is electrically conductive. It is a very hard solid material. It has brown color. It decomposes in water.
It is used in microelectronics as a contact material, for conductive layers, and barrier layers between silicon and other metals, eg. tungsten or copper. It is less commonly used than titanium nitride or tungsten films.
Tungsten nitride forms together with tungsten dioxide, tungsten trioxide, and tungsten pentoxide when a light bulb breaks while the filament is heated. [1]
Tungsten silicide is another material with similar use.
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